Adopts contact surface topography measurement, which is a breakthrough development of traditional surface topography measurement. The minimum contact force can reach 1mg, and no special requirements for the reflective properties of the test surface, material type, and material hardness.

Production-applied high-precision flat-panel coating equipment systems and process modules with full substrate handling and management automation for throughput and process flexibility. The system can be used for pilot production or integrated for high-volume production.

Functionally integrated coating system can implement strict control of water and oxygen environment through the functional integration of coating equipment and glove box, and realize functional integration such as high-precision coating experiments and sample characterization.

Unique slot die coating technology, also known as slot coating or extrusion coating, enables efficient, high-performance deposition of a wide range of materials for photovoltaic panels, flat panel displays, solid state lighting and various organic and printing and many other applications.