Stylus Profiler-Millennial Solar

Stylus Profiler
SP200

In the fields of SC, PV, LEDs, MEMS devices, materials, etc., accurate measurement of surface step height and film thickness is of great value, and it is necessary to accurately and quickly measure and control various film step parameters.An important means to ensure material quality production efficiency.

Adopts contact surface topography measurement, which is a breakthrough development of traditional surface topography measurement. The minimum contact force can reach 1mg, and no special requirements for the reflective properties of the test surface, material type, and material hardness.

STRENGTHSPECIFICATION DOWNLOAD

Excellent Repeatability and Reproducibility

1. Single arch gantry design, excellent structural stability, greatly reduce the impact of ambient sound and vibration noise on the measurement signal, improve the measurement accuracy.
2. Linear variable differential capacitance sensor (LVDC) with sub-angstrom resolution up to 0.01 angstrom at 13um. With high signal-to-noise ratio and low linear error, the product can scan the morphological features of several nanometers to several hundred microns.

Ultramicro Constant Force Sensor: 1-50mg adjustable

Unique sensor design enables ultrafine and normal force measurement on a single platform. Constant force measurement can be adjusted to adapt to hard or soft material surfaces. Ultra-low inertia design and small electromagnetic force control, to achieve accurate contact measurement without contact damage.

Ultra-flat Scanning Platform

System is equipped with ultra-high straightness guide rail to eliminate the slight dither in motion, improve the scanning accuracy, and truly reflect the micro morphology of the workpiece.

Fully Automatic XY Loading Platform, Z-axis Automatic Lifting, 360° Fully Automatic θ Turntable

Precision XY platform combined with the 360° continuous rotating electric rotary table can adjust the position and Angle of the sample. The three-dimensional position can be adjusted, which is conducive to sample adjustment and improve the measurement efficiency.

Content	Specification
Technical measurement	Probe surface profile measurement technique
Sample observation	Optical navigation camera: 5 megapixel high resolution color camera, FoV, 1700*1400μm
Probe sensor	Ultra-low inertia, LVDC sensor
Measured force	1-50mg adjustable
Probe selection	Probe curvature radius 2μm, including Angle 60°
Z-axis measurement repeatability	＜0.5% a 4.7um standard step sample block measured with a 50X objective lens at 20 ±2 °C
Platform movement range X/Y	Electric X/Y (100mm*100mm), can also be manually leveled
Sample R-θ loading platform	Electric, 360° continuous rotation
Single scan length	55mm
Maximum sample thickness	50mm
Maximum wafer size of loading platform	150mm (6 hours), 200mm (8 hours)
Step height repeatability	< 1nm (Measure 1μm step height, 1δ)
Sensor range	330μm
Vertical resolution	Resolution < 0.25A (13um range)
Scanning speed	2μm/s-10mm/s
Instrument power supply	100-240 VAC, 50/60 Hz
Use environment	Relative humidity: Humidity (non-condensation) 30-40%RH Temperature: 16-25℃ (temperature change less than 2℃ per hour) Ground vibration: 6.35μm/s (1-100Hz) Audio noise: ≤80dB Air laminar flow: ≤0.508 m/s (downward flow)
Size and weight	Length × width × height: 640626534(mm) Total weight of the instrument: <50kg

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