3D Microscope-Millennial Solar

3D Microscope
ME-PT3000

ME-PT3000 is a high speed confocal scanning microscope for accurate and reliable 3 dimensional (3D) measurements. Real-time confocal microscopic images can be realized by fast optical scanning module and signal processing algorithm.

Optical instrument specially used for the quality inspection of grid line and suede surface of photovoltaic cell in photovoltaic industry. Quantitatively detect the height and width of the grid lines on the photovoltaic cells and the number of pyramids on the textured surface to feedback the process quality of photovoltaic cell cleaning and texturing and screen printing.

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Five Analytical Functions

It provides five analysis functions, including roughness analysis, geometric profile analysis, structure analysis, frequency analysis and function analysis. Roughness analysis includes full-parameter analysis functions such as line roughness, surface roughness and flatness. Geometric profile analysis includes step height, distance, Angle, curvature and other features measurement and straightness, roundness, shape and position tolerance evaluation. The structural analysis includes pore volume and trough depth. Frequency analysis includes texture direction and spectrum analysis. Functional analysis includes SK parameters and volume parameters.

Powerful Data Processing Function

It provides data processing functions of adjusting position, correcting, filtering and extracting four modules, among which adjusting position includes image leveling, mirroring and other functions. Correction includes spatial filtering, correction, peak denoising and other functions; Filtering includes removal of appearance, standard filtering, spectrum filtering and other functions; Extraction includes extraction of regions and profiles.

Wide Range of Applications

Surface morphology characteristics of various products, components and materials, such as flatness, roughness, corrugation, surface profile, surface defects, wear, corrosion, pore clearance, step height, bending deformation, machining, etc., are measured and analyzed.

High precision and repeatability

Pinhole confocal optical system, high stability structure design and excellent 3D reconstruction algorithm are used to form the measurement system to ensure high measurement accuracy.

● Measurement and analysis operate on the same interface without switching, and the measurement data is automatically counted, realizing the function of rapid batch measurement.
● Visual window for users to observe the scanning process in real time.
● Combined with the automatic measurement function of the custom analysis template, the multi-area measurement and analysis process can be automatically completed.
● Complete five functional modules: geometric analysis, roughness analysis, structure analysis, frequency analysis and function analysis.
● One-click analysis, multi-file analysis, free combination of analysis items saved as analysis templates, one-click analysis of batch samples, and provide data analysis and statistical chart functions.
● Measure more than 300 kinds of 2D and 3D parameters according to ISO/ ASME/ EUR/ GBT and other standards.

Content	Specification
Microobjective	10×,20× (optional),50×,100×
Optical principle	Principles of confocal three-dimensional imaging
Vision size	1.2×1.2mm~0.12×0.12mm
Overall magnification	198-39966
Light source	White LED
Light-receiving element	Ultra fine color CMOS
Z-axis measurement repeatability	＜0.5% a 4.7um standard step sample block measured with a 50X objective lens at 20 ±2 °C
Z-axis measurement accuracy	±1.5%
Z-axis display resolution	1nm
Z-axis scan range	10mm
XY axis measurement repeatability	＜0.5% a 80um standard sample block measured with a 50X objective lens at 20 ±2 °C
XY axis measurement accuracy	±2%
Movement range of loading platform	230 x 230mm
Platform load	10kg
Mapping measurement function	Multiple areas can be automatically measured according to the template
Light source lifetime	60000 hours
Textured surface pyramid measurement	1. Surface two-dimensional and three-dimensional structure 2. Measurement of the height and width of a single pyramid 3. Pyramid counting function: can automatically count out the number of grains within the unit area, and on the view with a cross symbol to mark the grain position, the number distribution map of different specifications pyramid.
Grid line measurement	1. Grid line height and width measurement function: the number of section lines in a single field of view can be adjusted to not less than 12, the height and width data are calculated automatically, and the height to width ratio is calculated automatically; At the same time, it provides the function of end-user input nominal value of aspect ratio, and can automatically determine OK/NG according to the nominal value. 2. Grid line area automatic division function: can automatically ring out the edge of the grid line, and automatically calculate the grid line area, volume and other parameters in the region. 3. Grid line automatic measurement function: with multiple grid line automatic search measurement function, can be based on different specifications of the substrate to generate measurement templates and complete automatic measurement.
Pad point measurement	1. The Pad points were measured in 6×7 regions, and 3D full morphology was obtained by splicing 2. The height difference of the curved topography and surface can be measured, so as to analyze the printing effect of Pad points.
True color image function	A true color image of the surface can be scanned for contamination discrimination.
Groove measuring function	The 3D contour image reconstruction and accurate depth and width measurement can be achieved for both the upper and lower grooves with the same width and the upper and lower narrow grooves
Lens collision protection	The software ZSTOP sets the limit anti-collision protection and the hardware electronic sensor anti-collision protection
Noise evaluation	Environmental noise detection module with nanometer resolution
Surface morphology repeatability Str	It has the function of one-click analysis of surface morphology repeatability Str parameter
Dimension	540379594mm
Gross Weight	45kg
Working power	AC220V/50Hz
Working environment	Temperature 10℃~35℃, temperature gradient < 1℃/15 minutes, humidity 30~80% vibration <0.002g, lower than 15Hz